Effect of orientation and size of silicon single crystal to Electro-Ultrasonic Spectroscopy

Recently, a novel nondestructive method so-called Electro-Ultrasonic Spectroscopy (EUS) has been reported. In this technique, the intermodulation signals between mechanical and electrical excitation is measured, so that it offers high signal to noise ratio due to the different frequency range from those of excitation signals. EUS is the method under developing, so that the procedure of EUS should be established. In the present work, the size and orientation effect of the specimen were analyzed. Firstly, peak frequency of transducer is measured. Wave velocity in each orientation is calculated from Crystoffel’s equation, and appropriate length of specimen was selected. The actual vibration of specimen and transducer was measured by laser Doppler vibrometer. Results confirm that the size of specimen should be determined by considering the wave velocity.